MAIN SPECIFICATIONS:

Cathode Capabillity:
-3 Rectangular Sputter Cathodes (450mm X 75mm)                                                    
-1 Rectangular Ion Source( or Sputter)

Sample Capabillity-More than 200 pcs 15mmx15mm small sampleor  Multi bar shape samples or  Flexible substrate-Double side coating

• Custom-type SS316L electro-polished chamber
• 5E-7 torr Base Pressure (5E-8 torr can reach via replace main pump)
• Ir heating element with sample heating temperature: 500°C
• DC, RF, or pulsed-DC power supplies
• Ion Source
• Pressure control system: upstream and downstream
• FBBeam System Control Software